COMPOSITION FOR TREATING SURFACE OF SUBSTRATE, METHOD AND DEVICE

Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.

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Bibliographische Detailangaben
Hauptverfasser: THEODOROU, Kathleen, Esther, CHEN, Tianniu, INAOKA, Seiji, VRTIS, Raymond, Nicholas, BROWN, Mark, Richard, CASTEEL, William, Jack, Jr
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.