USING REFRACTORY METAL SILICIDATION PHASE TRANSITION TEMPERATURE POINTS TO CONTROL AND/OR CALIBRATE RTP LOW TEMPERATURE OPERATION

Bibliographische Detailangaben

Hauptverfasser:	RAINEESH JAISWAL, BEI CHAO ZHANG, JOHNNY CHAM, LEONG CHEE KONG, RAVI SANKAR YELEMANCHI, HAZNITA ABD KARIM, ZHONG YUN ZHU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS SEMICONDUCTOR DEVICES TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!