METHOD FOR WAFER-LEVEL MANUFACTURING OF OBJECTS AND CORRESPONDING SEMI-FINISHED PRODUCTS

The method for manufacturing an object comprises the steps of (a) providing a wafer comprising a multitude of semi-finished objects; (b) separating said wafer into parts referred to as sub-wafers, at least one of said sub-wafers comprising a plurality of said semi-finished objects; (c) processing at...

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Bibliographische Detailangaben
Hauptverfasser: ROSSI, Markus, RIEL, Peter, RUDMANN, Hartmut
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The method for manufacturing an object comprises the steps of (a) providing a wafer comprising a multitude of semi-finished objects; (b) separating said wafer into parts referred to as sub-wafers, at least one of said sub-wafers comprising a plurality of said semi-finished objects; (c) processing at least a portion of said plurality of semi-finished objects by subjecting said at least one sub-wafer to at least one processing step; and preferably also the step of (d) separating said at least one sub-wafer into a plurality of parts.