ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS
OF THE DISCLOSURE ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS Described herein is an etching solution suitable for both tungsten-containing metals and TiN-containing materials, which comprises: water; and one or more than one oxidizers; and one or more than one of the components selected from the...
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| Sprache: | eng |
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