IMPROVED SPUTTERING PROCESSING AND APPARATUS

A process for sputtering a plurality of integrated circuit ("IC") units, the process having at least the steps of: applying a layer to a holding ring; cutting an array of apertures in the layer; transferring the holding ring to a template positioned within a placement station; aligning the...

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Bibliographische Detailangaben
Hauptverfasser: SHIN Yun Suk, JUNG Jong Jae, JANG Deok Chun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A process for sputtering a plurality of integrated circuit ("IC") units, the process having at least the steps of: applying a layer to a holding ring; cutting an array of apertures in the layer; transferring the holding ring to a template positioned within a placement station; aligning the array of apertures with an array of recesses in the template; delivering IC units to the holding ring, each IC unit corresponding to an aligned aperture and recess, and then; applying a sputtering process to the IC units engaged with the holding ring.