Semiconductor Device Including Through Silicon Vias Distributing Current

OF THE DISCLOSURE A semiconductor device includes first to M-th semiconductor dies stacked in a first direction. Each of the first to M-th semiconductor dies includes a substrate, first to K-th through silicon vias passing through the substrate in the first direction, and a first circuit to receive...

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Bibliographische Detailangaben
Hauptverfasser: JONG-HO MOON, JAEYOUN YOUN, CHISUNG OH, SEUNGHAN WOO, KYOMIN SOHN, YONG-KI KIM, SOOJUNG RHO
Format: Patent
Sprache:eng
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Zusammenfassung:OF THE DISCLOSURE A semiconductor device includes first to M-th semiconductor dies stacked in a first direction. Each of the first to M-th semiconductor dies includes a substrate, first to K-th through silicon vias passing through the substrate in the first direction, and a first circuit to receive power through a power supply line electrically connected to the first through silicon via. Each of first to K-th through silicon vias of the N-th semiconductor die is electrically connected to a through silicon via of first to K-th through silicon vias of the (N+1)-th semiconductor die that is spaced apart therefrom in a plan view. FIG. 1