GLASS ARTICLES AND METHODS FOR CONTROLLED BONDING OF GLASS SHEETS WITH CARRIERS

GLASS ARTICLES AND METHODS FOR CONTROLLED BONDING OF GLASS SHEETS WITH CARRIERS

Surface modification layers (30) and associated heat treatments, that may be provided on a sheet (20), a carrier (10), or both, to control both room-temperature van der Waals (and/or hydrogen) bonding and high temperature covalent bonding between the thin sheet and carrier. The room-temperature bond...

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Bibliographische Detailangaben
Hauptverfasser: MANLEY, Robert George, BOOKBINDER, Dana Craig, THOMAS, John Christopher, MAZUMDER, Prantik, RAVICHANDRAN, Vasudha, BELLMAN, Robert Alan, ENICKS, Darwin Gene, CHANG, Theresa, DOMEY, Jeffrey John, STEPHENS, Alan Thomas, II
Format: Patent
Sprache:eng
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Zusammenfassung:Surface modification layers (30) and associated heat treatments, that may be provided on a sheet (20), a carrier (10), or both, to control both room-temperature van der Waals (and/or hydrogen) bonding and high temperature covalent bonding between the thin sheet and carrier. The room-temperature bonding is controlled so as to be sufficient to hold the thin sheet and carrier together during vacuum processing, wet processing, and/or ultrasonic cleaning processing, for example. And at the same time, the high temperature covalent bonding is controlled so as to prevent a permanent bond between the thin sheet and carrier during high temperature processing, as well as maintain a sufficient bond to prevent delamination during high temperature processing.