A MICRO-ELECTROMECHANICAL-SYSTEM BASED MICRO SPEAKER

A micro-electromechanical-system (MEMS) based speaker includes a support structure (110), and flexible membranes (221 222) connected to the support structure. The flexible membranes defleet relative to the support structure (110) in response to a control signals influencing piezoelectric actuators (...

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Bibliographische Detailangaben
Hauptverfasser:	HANSSON, Josef, WÅRDH, Jonatan
Format:	Patent
Sprache:	eng
Schlagworte:	ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MUSICAL INSTRUMENTS PERFORMING OPERATIONS PHYSICS PUBLIC ADDRESS SYSTEMS SOUND-PRODUCING DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A micro-electromechanical-system (MEMS) based speaker includes a support structure (110), and flexible membranes (221 222) connected to the support structure. The flexible membranes defleet relative to the support structure (110) in response to a control signals influencing piezoelectric actuators (231, 232) mechanically linked to the flexible membranes. The flexible membranes (221 222) contain at least one slit (340) forming at least one opening between the flexible membrane and the support structure and/or at least one opening in the flexible membranes. At least one bridging member (350) mechanically interconnects the flexible membrane and the support structure that are separated by the opening there between formed by the at least one slit and/or at least two portions of the flexible membrane that are separated by the at least one opening therein formed by the at least one slit. The at least one bridging member (350) is arranged in a plane different from a plane in which the flexible membranes (221, 222) are arranged in relation to the support structure (1 10).