Förfarande för färgmodifiering av anoder för tunnfilmsanordningar

The present invention discloses a color-modifying method, which copmrises the provision of a metal oxide thin film (14) based on Ni and/or Cr. The method is characterized in that, when coloring the metal oxide film (14), exposing the metal oxide thin film to ozone, and when bleaching the metal oxide...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ANDRIS AZENS, LISEN KULLMAN, CLAES-GOERAN GRANQVIST
Format: Patent
Sprache:swe
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Beschreibung
Zusammenfassung:The present invention discloses a color-modifying method, which copmrises the provision of a metal oxide thin film (14) based on Ni and/or Cr. The method is characterized in that, when coloring the metal oxide film (14), exposing the metal oxide thin film to ozone, and when bleaching the metal oxide film, exposing the metal oxide film to UV radiation (18). A lamination process or a deposition of another thin film may follow the exposure. Preferably, exposing the metal oxide thin film (14) to ultraviolet radiation (18) in an oxygen-containing atmosphere (20) provides the ozone exposure and exposing the metal oxide thin film to ultraviolet radiation (18) in an oxygen-free atmosphere (20) provides the ultraviolet exposure.