LJUSKENSLIGT HALVLEDARDON INNEFATTANDE ETT HALVLEDARKRISTALLSUBSTRAT OCH EN ANTIREFLEXBELEGGNING PA SUBSTRATET
A polycrystalline silicon layer provides an antireflective coating on a semiconductor surface of a photo-sensitive detector, the polycrystalline silicon layer containing from 25 to 45 atomic percent of oxygen and having a refractive index intermediate that of the semiconductor crystal and the exteri...
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| Format: | Patent |
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| Zusammenfassung: | A polycrystalline silicon layer provides an antireflective coating on a semiconductor surface of a photo-sensitive detector, the polycrystalline silicon layer containing from 25 to 45 atomic percent of oxygen and having a refractive index intermediate that of the semiconductor crystal and the exterior environment. |
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