A METHOD TO DETERMINE THICKNESS AND WAVE HEIGHT OF A THIN SUBSTRATE

A BS T R A C TA method to measure thickness and wave height of a thin substrate (3), wherein that the method comprising the steps of a) placing a first electrode (2a) against a first side (3a) of the substrate (3) and a second electrode (2b) against a second side (3b) of the substrate (3), b) removi...

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Bibliographische Detailangaben
Hauptverfasser:	BACKFOLK, Kaj, LOZOVSKI, Tadeus, MALDZIUS, Robertas, HEISKANEN, Isto, SIDARAVICIUS, Jonas
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A BS T R A C TA method to measure thickness and wave height of a thin substrate (3), wherein that the method comprising the steps of a) placing a first electrode (2a) against a first side (3a) of the substrate (3) and a second electrode (2b) against a second side (3b) of the substrate (3), b) removing the substrate (3) from the electrodes (2a, 2b), c) measuring the electrical capacitance between the electrodes, using the electrical capacitance value from step (c) to determine the distance, dAC, between the first electrode (2a) and the second electrode (2b), i.e. the distance between the substrate's wave tops, measuring the thickness, dMECH, of the substrate with a micrometer (7), and combining the results from step (d) and step (e) to calculate the wave height of the substrate.