INTEGRATED MICROMECHANICAL GYROSCOPE-ACCELEROMETER

FIELD: measuring equipment.SUBSTANCE: invention relates to measurement equipment and microsystem equipment. Essence of the invention consists in that the integrated micromechanical gyroscope-accelerometer additionally comprises four fixed electrodes of capacitive displacement transducers, four fixed...

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Bibliographische Detailangaben
Hauptverfasser: Ezhova Olga Aleksandrovna, Konoplev Boris Georgievich, Lysenko Igor Evgenevich, Sevostyanov Dmitrij Yurevich
Format: Patent
Sprache:eng ; rus
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