METHOD FOR FORMING AN ORDERED ARRAY OF SILICON NANOCRYSTALS OR NANOCLUSTERS IN A DIELECTRIC MATRIX

FIELD: nanotechnologies.SUBSTANCE: invention can be used to produce nanosized composite structures. Essence of the invention is that the method of forming an ordered array of silicon nanocrystals or nanoclusters in a dielectric matrix includes formation on a substrate of a multilayer film consisting...

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Bibliographische Detailangaben
Hauptverfasser:	Kamenskikh Irina Aleksandrovna, Zhigunov Denis Mikhajlovich, Popov Aleksandr Afanasevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING
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Beschreibung
Zusammenfassung:	FIELD: nanotechnologies.SUBSTANCE: invention can be used to produce nanosized composite structures. Essence of the invention is that the method of forming an ordered array of silicon nanocrystals or nanoclusters in a dielectric matrix includes formation on a substrate of a multilayer film consisting of alternating layers of SiNand SiN, where 0