METHOD OF PRODUCING DIELECTRIC LAYER BASED ON POLYMER COATING IN MICROELECTRONICS PRODUCTS

FIELD: electronics.SUBSTANCE: claimed invention relates to the field of microelectronics, namely to methods for production of dielectric layer of interlayer insulation of certain thickness in products of microelectronics based on polymer coating. Method of producing a dielectric layer based on a pol...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Zhukov Andrej Aleksandrovich, Kalashnikov Anton Yurevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!