METHOD OF PRODUCING THROUGH MICROHOLES IN A SILICON SUBSTRATE

FIELD: microelectronics.SUBSTANCE: invention relates to the field of microelectronics technology and can be used in making 3D devices of microsystem equipment, for example micro injectors, micromotors, and namely when obtaining through microholes in a silicon substrate. Method of producing through m...

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Bibliographische Detailangaben
Hauptverfasser:	Zhukov Andrej Aleksandrovich, Zapetlyaev Valentin Mikhajlovich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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