METHOD OF MANUFACTURING THINNED TWO-SPECTRAL PHOTOSENSITIVE ASSEMBLY

FIELD: manufacturing technology.SUBSTANCE: invention relates to the technology of manufacturing semiconductor two-spectral hybridized assemblies and can be used to create matrix photodetectors (MPD) for various purposes. For the implementation of TTS PSA produce hybridization M×K LSI readings and ma...

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Hauptverfasser: Kiseleva Larisa Vasilevna, Boltar Konstantin Olegovich, Akimov Vladimir Mikhajlovich, Savostin Aleksandr Viktorovich, Vlasov Pavel Valentinovich, Stolyarov Dmitrij Sergeevich, Lopukhin Aleksej Alekseevich, Irodov Nikita Aleksandrovich, Grishina Anna Nikolaevna
Format: Patent
Sprache:eng ; rus
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