METHOD OF PRODUCING NANOLITHOGRAPHIC DRAWINGS WITH A CRYSTALLINE STRUCTURE WITH A SUPER-DEVELOPED SURFACE

FIELD: technological processes.SUBSTANCE: usage for nanolithographic drawings with a crystal structure with a super-developed surface. Essence of the invention is that by means of the probe mechanical action on the silicon substrate, a spatial profile is formed in the shape of a region of width 7 mc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bobkov Anton Alekseevich, Moshnikov Vyacheslav Alekseevich, Averin Igor Aleksandrovich, Yakushova Nadezhda Dmitrievna, Pronin Igor Aleksandrovich, Karmanov Andrej Andreevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MANUFACTURE OR TREATMENT THEREOF NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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