SOLID STATE POWER TRANSISTOR PRODUCTION TECHNIQUE

FIELD: electricity.SUBSTANCE: front surface of the solid state power transistor is settled out by the silicium nitride from a gaseous phase 0.1-0.2 microns thick in the solid state power transistor manufacturing process. The polycrystalline silicon in the grooves is acidulated after the impurity dop...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Anurov Aleksej Evgenevich, Ryabev Aleksej Nikolaevich, Plyasunov Viktor Alekseevich, Basovskij Andrej Andreevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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