METHOD FOR QUANTITATIVE THREE-DIMENSIONAL RECONSTRUCTION OF SILICON MICRO- AND NANOSTRUCTURES SURFACE

FIELD: physics, measurement equipment.SUBSTANCE: invention refers to the field of scanning electron microscopy. The invention uses the principle of photogrammetric processing of images obtained by means of a scanning electron microscope at various angles of inclination of the investigated object. Th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Karabanov Dmitrij Aleksandrovich, Kuzin Aleksandr Yurevich, Filippov Mikhail Nikolaevich, Vasilev Aleksandr Leonidovich, Mityukhlyaev Vitalij Borisovich, Semenov Mikhail Alekseevich, Mikhutkin Aleksej Aleksandrovich, Todua Pavel Andreevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!