OBJECT LINEAR DISPLACEMENT DEVICE WITH NANOMETER ACCURACY IN WIDE RANGE OF POSSIBLE DISPLACEMENTS

FIELD: mechanics.SUBSTANCE: invention relates to precise mechanics and measuring equipment and can be used for objects precision linear displacement. Disclosed object linear displacement device with nanometer accuracy in wide range of possible displacements includes support (fixed) part and moving part with object, displacing moving part drive. Besides, disclosed device comprises monochromatic radiation source, which generates point source of radiation, combined with optical system front focal point, forming parallel light beam with optical axis, parallel to displacement direction. Behind optical system are arranged in series along beams path perpendicular to beam axis and in parallel to each other two transparent plates with highly reflecting coatings on working surfaces, facing each other, one of plates is fixed on object, mounted on movable part, and other plate is installed on fixed part, in peripheral part of plate fixed on object, with its non-working surface three actuator are connected, behind plates along beam path photodetector module is arranged, signals from which are coming to computer input, signals from computer output are coming to drive, connected with movable part, and actuators connected with plate, fixed on object, device additionally comprises lens, used photodetector module is two-dimensional matrix photodetector, on displacement object plate is fixed, first along beam path, at least, one of plates working surface is made in form of curvilinear surface with level difference, monotonously varying from plate center to its edge and making not less than half of probing radiation wavelength.EFFECT: technical result is increase in object displacement accuracy in wide range of distances.5 cl, 2 dwg Изобретение относится к точной механике и измерительной технике и может быть использовано в оборудовании для прецизионного линейного перемещения объектов. Заявленное устройство для линейного перемещения объекта с нанометровой точностью в большом диапазоне возможных перемещений включает опорную (неподвижную) часть и подвижную часть с установленным на ней объектом, привод, перемещающий подвижную часть Кроме того, заявленное устройство содержит источник монохроматического излучения, формирующий точечный источник излучения, совмещенный с передним фокусом оптической системы, формирующей параллельный пучок света с оптической осью, параллельной направлению перемещения. За оптической системой последовательно по ходу лучей установлены перпендикулярно оси п