INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER

FIELD: measuring equipment.SUBSTANCE: invention relates to measurement equipment and microsystems. This invention consists in the fact that the device additionally includes four additional movable electrode of capacitance displacement transducers, made in the form of perforated plates with comb-shaped structures on both sides of semiconducting material and arranged with clearance relative to substrate eight additional fixed electrodes of capacitance displacement transducers, made with comb-shape structures on one side and located directly on the substrate so that they form with additional moving electrodes of capacitance transducers movements of capacitors in the plane of their plates through side gaps and interpenetrating combs of electrodes, four additional movable electrodes of electrostatic actuators made in the form of perforated plates with comb-shaped structures on both sides of semiconducting material and arranged with clearance relative to substrate nine additional fixed electrodes of electrostatic actuators made with comb-shaped structures on one side of the semiconducting material and located directly on the substrate so that they form an electrostatic interaction with moving electrodes of electrostatic actuators in plane of their plates through side gaps and interpenetrating combs of electrodes, sixteen U-shaped spring beam systems, made in the form of plates of semiconducting material and arranged with clearance relative to substrate and twenty one additional support made of semiconducting material and located directly on the substrate, where two inertia masses are made with perforation, a substrate and fixed electrodes of capacitance displacement transducers are made of semiconducting material.EFFECT: technical result is possibility of measuring angular velocity along axis Y located in plane of the substrate, and Z directed perpendicular to plane of the substrate, and values of linear acceleration along Χ, Y, and Z axes.1 cl, 2 dwg Изобретение относится к области измерительной техники и микросистемной техники. Сущность изобретения заключается в том, что в устройство дополнительно введены четыре дополнительных подвижных электрода емкостных преобразователей перемещений, выполненные в виде пластин с перфорацией с гребенчатыми структурами с двух сторон из полупроводникового материала и расположенные с зазором относительно подложки, восемь дополнительных неподвижных электродов емкостных преобразователей перемещений, выполненные с гребенчатыми стру