METHOD OF EXTRACTING COMPONENTS FROM STEAM-GAS MIXTURES FORMED DURING PRODUCTION OF POLYCRYSTALLINE SILICON

FIELD: chemistry.SUBSTANCE: invention relates to production of polycrystalline silicon. In process of producing silicon are formed steam-gas mixtures containing vapour of chlorosilanes, hydrogen and hydrogen chloride. For extraction of chlorosilanes, hydrogen and hydrogen chloride, method comprises...

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Hauptverfasser:	Mashkovtsev Pavel Dmitrievich, Sidorov Viktor Mikhajlovich, Bessonnyj Evgenij Anatolevich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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