USE OF SURFACTANTS, CONTAINING AT LEAST THREE SHORT-CHAIN PERFLUORINATED GROUPS, FOR PRODUCTION OF MICROCHIPS, HAVING PATTERNS WITH DISTANCE BETWEEN LINES OF LESS THAN 50 NM

FIELD: chemistry.SUBSTANCE: described is use of surface-active substances A, 1 WT% water solution of which has static surface tension of < 25 mN/m. Said surfactants A contain three short-chain perfluorinated groups Rf, selected from group consisting of trifluoromethyl, pentafluoroethyl, 1-heptafl...

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Bibliographische Detailangaben

Hauptverfasser:	MAJER DITER, KLIPP ANDREAS
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	ADHESIVES CHEMISTRY DYES MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES
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