COMPENSATION ACCELEROMETER

FIELD: measurement equipment.SUBSTANCE: accelerometer comprises a body, the first plate from single-crystal silicon with mobile and fixed parts and elastic links that connect them along the suspension axis, a differential capacitance position converter with two fixed electrodes on the second plate,...

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Bibliographische Detailangaben
Hauptverfasser: AVGUSTOV LEV IVANOVICH, BAZHENOV VLADIMIR IL'ICH, GORBACHEV NIKOLAJ ALEKSEEVICH, SOLOV'EV JURIJ VLADIMIROVICH, SOLOV'EV VLADIMIR MIKHAJLOVICH
Format: Patent
Sprache:eng ; rus
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