METHOD FOR PRE-EPITAXIAL TREATMENT OF SURFACE OF GERMANIUM SUBSTRATE

FIELD: chemistry.SUBSTANCE: in a method for pre-epitaxial treatment of the surface of a germanium substrate, the process of removing the natural germanium oxide layer from the surface of the substrate and the process of removing inorganic impurities from the surface of the substrate are carried out...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	BELOUSOV VIKTOR SERGEEVICH, SPITSYNA NADEZHDA NIKANOROVNA, ILLARIONOV VLADIMIR VIKTOROVICH, CHEBOTAREV JURIJ ALEKSEEVICH, CHEBOTAREVA ANNA ALEKSEEVNA, LAPSHINA ANASTASIJA ANATOL'EVNA
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!