MULTIFUNCTIONAL SENSORY MICROELECTROMECHANICAL SYSTEM

FIELD: physics.SUBSTANCE: multifunctional sensory microelectromechanical system (MEMS) is intended for use in gas analysers, in medicine as biosensors, in microelectronics and other high-tech fields for controlling technological processes. The multifunctional sensory MEMS comprises a group of resona...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BYKOV VIKTOR ALEKSANDROVICH, SOKOLOV DMITRIJ JUR'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MANUFACTURE OR TREATMENT THEREOF MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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