DEVICE FOR INSPECTING SURFACE ROUGHNESS

FIELD: physics.SUBSTANCE: device has, mounted on a board, a three-axis precision table on which there is an X-ray tube which emits in the soft X-ray range, and an ion source for cleaning the target, a monochromator chamber in which there is a monochromator and a probing beam intensity monitor, and a...

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Bibliographische Detailangaben
Hauptverfasser: SALASHCHENKO NIKOLAJ NIKOLAEVICH, CHKHALO NIKOLAJ IVANOVICH, PESTOV ALEKSEJ EVGEN'EVICH, BARYSHEVA MARIJA MIKHAJLOVNA
Format: Patent
Sprache:eng ; rus
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