BONDED SEMICONDUCTOR RESISTIVE STRAIN GAUGE

FIELD: measurement equipment.SUBSTANCE: resistive strain gauge includes polymer substrate 1, separating dielectric film 2, for example from silicon monoxide, strain-sensitive film 3 from samarium monosulphide, contact metal platforms 4, which are located on its ends, and metal films made in the form...

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Bibliographische Detailangaben
Hauptverfasser: ZAKHAROV JURIJ VASIL'EVICH, KAMINSKIJ VLADIMIR VASIL'EVICH, VOLODIN NIKOLAJ MIKHAJLOVICH, MISHIN JURIJ NIKOLAEVICH
Format: Patent
Sprache:eng ; rus
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