METHOD FOR OBTAINING FERROMAGNETIC FILM FROM SILICIDE NANOCLUSTERS ON SURFACE OF SILICONE SUBSTRATE

FIELD: metallurgy. ^ SUBSTANCE: method consists in plasma-chemical synthesis of self-organised silicide nanoclusters of transition ferromagnetic metals by way of pulse formation of counter flows of excited atoms of transition ferromagnetic metal and silicon at the characteristic distance determined...

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Bibliographische Detailangaben

Hauptverfasser:	BITJUTSKAJA LARISA ALEKSANDROVNA, DIKAREV JURIJ IVANOVICH, SIGOV ALEKSANDR SERGEEVICH, RUBINSHTEJN VLADIMIR MIKHAJLOVICH, ABRAMOV ALEKSANDR VLADIMIROVICH, BOGATIKOV EVGENIJ VASIL'EVICH, LAZAREV ALEKSANDR PETROVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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