METHOD FOR OBTAINING WEAR-RESISTANT AND THERMODYNAMICALLY RESISTANT MULTI-LAYER COATING ON BASIS OF HIGH-MELTING METALS AND THEIR COMPOUNDS

FIELD: metallurgy. ^ SUBSTANCE: to pre-cleaned surface of the substrate there applied are layers of coating by means of magnetron sputtering; at that, first, titanium adhesion layer is applied by magnetron sputtering of titanium target in inert gas; then, titanium nitride TiN layer is applied by spu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAMENEVA ANNA L'VOVNA, ANTSIFEROV VLADIMIR NIKITOVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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