SEMICONDUCTOR INTEGRATED CIRCUIT (VERSIONS)

FIELD: physics. ^ SUBSTANCE: invention relates to design and technology of manufacturing semiconductor integrated circuits (IC) and can be used in digital, analogue and memory units in microelectronics. The semiconductor IC has a high-resistance monocrystalline silicon layer grown in form of a hollo...

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Hauptverfasser: GAMKRELIDZE SERGEJ ANATOL'EVICH, MONAKHOV ALEKSANDR FEDOROVICH, CHARYKOV NIKOLAJ ANDREEVICH, KOZHITOV LEV VASIL'EVICH, KONDRATENKO TIMOFEJ TIMOFEEVICH, ABRAMOV PAVEL IVANOVICH, KONDRATENKO TIMOFEJ JAKOVLEVICH, KUZNETSOV EVGENIJ VIKTOROVICH
Format: Patent
Sprache:eng ; rus
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