METHOD FOR MEASUREMENT OF CLEARANCE BETWEEN ELECTRODES AND MOVING MASS OF MICROMECHANICAL DEVICE AND DEVICE FOR ITS REALISATION

FIELD: electricity. ^ SUBSTANCE: voltage is changed at least at one of the electrodes. Movable mass (MM) shifts determined by these voltage variations are measured by means of measuring the change of capacity between one of the electrodes and MM. Clearance is determined using shift-voltage dependenc...

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Bibliographische Detailangaben

Hauptverfasser:	NEKRASOV JAKOV ANATOL'EVICH, BELJAEV JAKOV VALER'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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