METHOD FOR MEASUREMENT OF CLEARANCE BETWEEN ELECTRODES AND MOVING MASS OF MICROMECHANICAL DEVICE AND DEVICE FOR ITS REALISATION

FIELD: electricity. ^ SUBSTANCE: voltage is changed at least at one of the electrodes. Movable mass (MM) shifts determined by these voltage variations are measured by means of measuring the change of capacity between one of the electrodes and MM. Clearance is determined using shift-voltage dependenc...

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Bibliographische Detailangaben
Hauptverfasser:	NEKRASOV JAKOV ANATOL'EVICH, BELJAEV JAKOV VALER'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	FIELD: electricity. ^ SUBSTANCE: voltage is changed at least at one of the electrodes. Movable mass (MM) shifts determined by these voltage variations are measured by means of measuring the change of capacity between one of the electrodes and MM. Clearance is determined using shift-voltage dependence, got by calculation from following expression: M(alpha, d, u)+calpha = 0, where: M - moment, created by electric field when voltage is supplied to one of the electrodes; alpha, d - tilt angle and clearance between MM and electrodes; c - resilient suspension stiffness of MM. Device for clearance measurement contains computing device which inputs are connected with voltage source and capacity-voltage converter outputs. ^ EFFECT: increase of clearance accuracy measurement. ^ 2 cl, 6 dwg