CARBON NANOSTRUCTURE PREPARATION METHOD

FIELD: carbon materials. ^ SUBSTANCE: invention relates to preparing carbon nanostructures on surfaces of solids with the aid of electron probe and can be used in electron lithography to make shields used for subsequent formation of semiconductor structures via chemical, plasma, and ionic etching. M...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHNITOV VLADIMIR VIKTOROVICH, NASHCHEKIN ALEKSEJ VIKTOROVICH, MIKUSHKIN VALERIJ MIKHAJLOVICH, GORDEEV JURIJ SERGEEVICH, NEVEDOMSKIJ VLADIMIR NIKOLAEVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MANUFACTURE OR TREATMENT THEREOF NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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