GASEOUS-DISCHARGE RADIATION SOURCE

FIELD: lighting engineering; spontaneous gaseous-discharge vacuum and vacuum ultraviolet radiation sources used in microelectronics for treating and cleaning surfaces by irradiating them. ^ SUBSTANCE: proposed device has power supply, bulb filled with working medium and formed by two coaxially mounted tubes made of dielectric material transparent for radiation, as well as two electrodes disposed on inner surface of internal tube and on outer surface of external tube. Internal tube of bulb accommodates metal heat-transfer apparatus that functions at the same time as high-voltage electrode. Heat-transfer apparatus is cooled down by forcing cooling gas through internal tube interior. ^ EFFECT: simplified design, reduced cost. ^ 2 cl, 2 dwg