METHOD OF MANUFACTURING SENSOR FOR GAS TRANSDUCER

FIELD: analyzing or investigating of materials. ^ SUBSTANCE: method comprises manufacturing semiconductive sensor made of insulating substrate provided with contacts applied in advance. The insulating substrate is coated with a layer of solder dioxide in argon and oxygen atmosphere alloyed by silico...

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Bibliographische Detailangaben
Hauptverfasser:	REMBEZA STANISLAV IVANOVICH, SVISTOVA TAMARA VITAL'EVNA, REMBEZA EKATERINA STANISLAVOVNA, DYRDA NATAL'JA NIKOLAEVNA
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	FIELD: analyzing or investigating of materials. ^ SUBSTANCE: method comprises manufacturing semiconductive sensor made of insulating substrate provided with contacts applied in advance. The insulating substrate is coated with a layer of solder dioxide in argon and oxygen atmosphere alloyed by silicon. ^ EFFECT: reduced operation temperature of the sensor. ^ 1 dwg