NITROGEN TRIFLUORIDE PURIFICATION PROCESS

FIELD: inorganic compounds technologies. ^ SUBSTANCE: invention is related to processes for separating mixtures obtained in synthesis of nitrogen trifluoride, which contain tetrafluoromethane, nitrogen trifluoride, nitrogen, and other gaseous substances. Process resides in that purification of nitrogen trifluoride is accomplished through absorption involving halogenated or perhalogenated compounds as absorbent followed by desorption. Purification is carried out consecutively from well soluble and scarcely soluble impurities. Absorption is conducted at excessive pressure, developed in absorber, from 5 to 11- atm and temperature from -50 to +100°C, while simultaneously removing blowing-off from absorber. In case of purification from scarcely soluble impurities, gas in amount 0.05 to 5.0% by weight based on gas supplied to absorber is blown off and, in case of purification from well soluble impurities, 15.0-90.0% by weight of gas is blown off. ^ EFFECT: enabled removal of all impurities using the same process flowsheets, which reduced volume of required equipment. ^ 5 cl, 1 dwg, 14 tbl, 12 ex