PROBE BASED ON QUARTZ RESONATOR FOR SCANNING PROBE MICROSCOPE

FIELD: nano technology, namely, devices providing receipt of information about condition of surface using scanning probe microscopy. ^ SUBSTANCE: probe based on quartz resonator for scanning probe microscope contains quartz resonator with first and second shoulders, held on which are respectively fi...

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Bibliographische Detailangaben
1. Verfasser: SOKOLOV DMITRIJ JUR'EVICH
Format: Patent
Sprache:eng ; rus
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