PROBE BASED ON QUARTZ RESONATOR FOR SCANNING PROBE MICROSCOPE

FIELD: nano technology, namely, devices providing receipt of information about condition of surface using scanning probe microscopy. ^ SUBSTANCE: probe based on quartz resonator for scanning probe microscope contains quartz resonator with first and second shoulders, held on which are respectively fi...

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Bibliographische Detailangaben
1. Verfasser:	SOKOLOV DMITRIJ JUR'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	FIELD: nano technology, namely, devices providing receipt of information about condition of surface using scanning probe microscopy. ^ SUBSTANCE: probe based on quartz resonator for scanning probe microscope contains quartz resonator with first and second shoulders, held on which are respectively first and second needles, which are held in grooves of shoulders of quartz resonator. Variants exist, in accordance to which grooves are made directly in shoulders of quartz resonator or in layers of glue, polymerized on each shoulder. Also possible are variants, in which exists a mechanical connection between needles or shoulders. ^ EFFECT: increased sensitivity of probe and its reliability. ^ 5 cl, 6 dwg