PROBE SENSOR BASED ON QUARTZ RESONATOR FOR SCANNING PROBE MICROSCOPE

FIELD: nano technology, in particular, devices, providing information about condition of surface with usage of scanning probe microscopy. ^ SUBSTANCE: probe sensor based on quartz resonator for scanning probe microscope contains platform with quartz resonator and base held on it, fastened serially o...

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Bibliographische Detailangaben
1. Verfasser:	SOKOLOV DMITRIJ JUR'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	FIELD: nano technology, in particular, devices, providing information about condition of surface with usage of scanning probe microscopy. ^ SUBSTANCE: probe sensor based on quartz resonator for scanning probe microscope contains platform with quartz resonator and base held on it, fastened serially on platform are flat piezo-ceramic plate with first and second electrodes, isolator and screen, and also a holder, while quartz resonator by electric outputs is held in holder with possible disconnection from it and force interaction of base and screen. ^ EFFECT: increased resolution of device, expanded functional capabilities. ^ 9 cl, 7 dwg