CABLE FOR SUPPLYING LOW-TEMPERATURE PLASMA GENERATOR WITH POWER

FIELD: power supply to high-voltage low-temperature plasma generators; microelectronics and diffraction optics for producing integrated circuits and diffraction gratings.] ^ SUBSTANCE: proposed cable designed to supply with power low-temperature plasma generator has fluoroplastic sheath in the form...

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Hauptverfasser: KAZANSKIJ NIKOLAJ L'VOVICH, KRICHEVSKIJ SERGEJ VASIL'EVICH, KOLPAKOV VSEVOLOD ANATOL'EVICH, KOLPAKOV ANATOLIJ IVANOVICH
Format: Patent
Sprache:eng ; rus
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