CABLE FOR SUPPLYING LOW-TEMPERATURE PLASMA GENERATOR WITH POWER

FIELD: power supply to high-voltage low-temperature plasma generators; microelectronics and diffraction optics for producing integrated circuits and diffraction gratings.] ^ SUBSTANCE: proposed cable designed to supply with power low-temperature plasma generator has fluoroplastic sheath in the form of hollow cylinder and conductor carrying stabilizing disks and isolating members mounted thereon by easy-slide fit, outer diameter of disk being 0.9 D, where D is inner diameter of insulating sheath; stabilizing disk section is in the form of angle measuring in range of 60° > alpha > 30°; outer surface of disks is rounded and abuts against inner diameter surface of sheath; isolating members in the form of tube, 0.5D-D in length, 0.2-03D in outer diameter are disposed between disks; stabilizing disks are spaced 0.5-1D apart; insulating sheath is potted in vacuum-resistant insulating liquid. Insulating sheath, stabilizing disks, and isolating members are made of vacuum insulating material such as fluoroplastic. ^ EFFECT: enhanced cable resistance to electrical breakdown when operating in vacuum. ^ 1 cl, 1 dwg