GENERATOR OF THE SUBSTANCES VAPOR MICROFLOW

FIELD: analytical instrument making industry; production of the generators of the substances vapor microflow. ^ SUBSTANCE: the invention is pertaining to the analytical instrumentation technologies and is intended for solution of the problem of creation of the constant in the long-time interval flow of the substances vapor and its controlled adjustment. The generator of the microflow of the substances vapor includes: the chamber having at least one hole; the located in the chamber on its working surface source of the substances vapors; the tool for variation of the temperature of the source of the substances vapors; and the block for measuring the value of the substance vapor flow. The chamber working surface is made in the form of the mass-sensitive piezoelectric transducer of the resonance type. The tool for variation of the temperature includes: the temperature adjustment unit; the heater or the cooler arranged on the working surface of the mass-sensitive piezoelectric transducer or on the surface of the chamber. The block for measuring of the value of the substance vapor flow includes the electronic generator of the alternating voltage made in the form of the noninverting amplifier and the meter of the speed of the frequency variation. At that the outlet of the noninverting amplifier is connected to its inlet through the mass-sensitive piezoelectric transducer, and the inlet of the meter of the speed of the frequency variation is connected to an outlet of the noninverting amplifier. The invention allows to provide production of the constant controlled microflow of the substances vapor, to simplify the design and to reduce the overall dimensions of the generator. ^ EFFECT: the invention ensures production of the constant controlled microflow of the substances vapor, simplification of the design, reduction of the overall dimensions of the generator. ^ 7 cl, 4 dwg, 4 ex