EXTREME ULTRAVIOLET SOURCE WITH ROTARY ELECTRODES AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION FROM GAS-DISCHARGE PLASMA

FIELD: technology for producing extreme ultraviolet radiation from gas-discharge plasma. ^ SUBSTANCE: as electrodes, two disk-shaped elements are utilized, central symmetry axes of which are combined with axis of shaft, peripheral portion of surface of at least one of electrodes is covered by later...

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Hauptverfasser:	VINOKHODOV ALEKSANDR JUR'EVICH, MISHCHENKO VALENTIN ALEKSANDROVICH, BORISOV VLADIMIR MIKHAJLOVICH, KHRISTOFOROV OLEG BORISOVICH, KIRJUKHIN JURIJ BORISOVICH, IVANOV ALEKSANDR SERGEEVICH, PROKOF'EV ALEKSANDR VASIL'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	FIELD: technology for producing extreme ultraviolet radiation from gas-discharge plasma. ^ SUBSTANCE: as electrodes, two disk-shaped elements are utilized, central symmetry axes of which are combined with axis of shaft, peripheral portion of surface of at least one of electrodes is covered by later of low melting-point metal, and also provided is a system for feeding low-melting point metal onto surface of at least one of aforementioned electrodes, and as system for initiation of discharge device for forming steam channel in peripheral area of inter-electrode gap is utilized. ^ EFFECT: increased frequency of movement of pulses, increased average power of extreme ultraviolet emission of gas-discharge plasma while providing for small dimensions thereof, increased lifetime and increased efficiency of extreme ultraviolet source, high stability of emission from pulse to pulse. ^ 2 cl, 2 dwg