BOLOMETRIC RESISTIVE ELEMENT

BOLOMETRIC RESISTIVE ELEMENT

FIELD: measurement technology. ^ SUBSTANCE: thermo-sensitive layer of element is made of titanium nitride with thickness of 0,003-0,015 mcm. There is layer inside membrane above thermo-sensitive layer which is separated from it by dielectric layer of membrane. The layer absorbs IR-radiation. Onto fa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHUKOV A.G, BAZHINOV A.N, RJABOV V.N
Format: Patent
Sprache:eng ; rus
Schlagworte:
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:FIELD: measurement technology. ^ SUBSTANCE: thermo-sensitive layer of element is made of titanium nitride with thickness of 0,003-0,015 mcm. There is layer inside membrane above thermo-sensitive layer which is separated from it by dielectric layer of membrane. The layer absorbs IR-radiation. Onto face side of substrate the layer is made to reflect IR-radiation. Space between thermo-sensitive and absorbing layers provides electric isolation between layers and is determined by dielectric material of membrane. ^ EFFECT: improved sensitivity of bolometric element; reduced production cost; low noise. ^ 2 cl, 2 dwg