MICROMECHANICAL VIBRATORY GYROSCOPE AND METHOD OF ITS MANUFACTURE

FIELD: gyro-inertial instruments; control systems of mobile objects. ^ SUBSTANCE: proposed micromechanical vibratory gyroscope has inertial mass suspended in housing by means of frames and cruciform torsion bars; joint areas of torsion bars with frames are provided with lugs formed over crystallogra...

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Bibliographische Detailangaben
Hauptverfasser:	ZOTOV S.A, SHILOV V.F, TIMOSHENKOV S.P, RUBCHITS V.G, TIKHONOV V.A, MAKSIMOV V.N, KALUGIN V.V, LAPENKO V.N, PLEKHANOV V.E
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	FIELD: gyro-inertial instruments; control systems of mobile objects. ^ SUBSTANCE: proposed micromechanical vibratory gyroscope has inertial mass suspended in housing by means of frames and cruciform torsion bars; joint areas of torsion bars with frames are provided with lugs formed over crystallographic planes; external and internal angles between faces of torsion bars are rounded-off and surfaces of torsion bars are polished. Mechanical structure of gyroscope is formed from mono-crystal silicon by successive three kinds of etching: plasma-chemical etching, anisotropic etching and isotropic etching. ^ EFFECT: enhanced sensitivity and strength relative to linear overloads; enhanced reliability. ^ 3 cl, 6 dwg