SCANNING PROBE TYPE MICROSCOPE COMBINED WITH APPARATUS FOR MECHANICALLY MODIFYING SURFACE OF OBJECT

FIELD: optical devices; microscopes. ^ SUBSTANCE: scanning microscope includes housing on which three-coordinate scanning device with probe holder is mounted; object holder; device for moving probe relative to object having first drive; apparatus for preliminary approaching probe holder to object ho...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MJULLER MARTIN, SAUNIN S.A, EFIMOV A.E, BYKOV V.A
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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