SCANNING PROBE TYPE MICROSCOPE COMBINED WITH APPARATUS FOR MECHANICALLY MODIFYING SURFACE OF OBJECT

FIELD: optical devices; microscopes. ^ SUBSTANCE: scanning microscope includes housing on which three-coordinate scanning device with probe holder is mounted; object holder; device for moving probe relative to object having first drive; apparatus for preliminary approaching probe holder to object ho...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MJULLER MARTIN, SAUNIN S.A, EFIMOV A.E, BYKOV V.A
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	FIELD: optical devices; microscopes. ^ SUBSTANCE: scanning microscope includes housing on which three-coordinate scanning device with probe holder is mounted; object holder; device for moving probe relative to object having first drive; apparatus for preliminary approaching probe holder to object holder; apparatus for modifying surface of object. The last is in the form of punch joined with mechanism for moving object holder relative to punch along curvilinear path at shifting by thickness value of mechanical modification and it is joined with second drive. Mechanism for moving object holder is incorporated in device for moving probe relative to object or in apparatus for preliminary approaching probe holder to object holder. Mechanism for moving object holder relative to punch may be in the form of beam mounted in housing and joined by its first end with object holder and by its second end with second drive. ^ EFFECT: enlarged manufacturing possibilities. ^ 12 cl, 3 dwg