METHOD FOR PREPARING HIGH-PURITY ISOTOPE-ENRICHED SILANE

METHOD FOR PREPARING HIGH-PURITY ISOTOPE-ENRICHED SILANE

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention concerns the development of method for preparing high-purity silane enriched with isotopes Si28 or Si29, or Si30 and used for preparing Si as monocrystals and films and also for covers made of monoisotope SiO2. High-purity isotope...

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Bibliographische Detailangaben
Hauptverfasser: TROSHIN O.JU, BULANOV A.D, PRJAKHIN D.A, BALABANOV V.V
Format: Patent
Sprache:eng ; rus
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Zusammenfassung:FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention concerns the development of method for preparing high-purity silane enriched with isotopes Si28 or Si29, or Si30 and used for preparing Si as monocrystals and films and also for covers made of monoisotope SiO2. High-purity isotope-enriched silane is prepared by reduction reaction of isotope-enriched silicon tetrafluoride with calcium hydride at 180-200 C. Reduction is carried out by static method in the closed system under pressure 30 atm, not less. Prepared silane is purified from fluorine-containing impurities by passing the prepared silane through reactor with calcium hydride. Then silane is purified from hydrocarbon impurities by fractionation method preferably. EFFECT: increased yield and purity of silane. 2 cl, 1 tbl, 1 ex