MAGNETOELECTRIC FORCE CONVERTER
FIELD: measurement technology, force control over sensitive masses of micromechanical pickups of type of accelerometer. SUBSTANCE: force converter incorporates pendulum unit made of single monocrystal of conductive silicon and carrying mobile element 3 on springy suspensions 7 and bearing frame 4 fr...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | FIELD: measurement technology, force control over sensitive masses of micromechanical pickups of type of accelerometer. SUBSTANCE: force converter incorporates pendulum unit made of single monocrystal of conductive silicon and carrying mobile element 3 on springy suspensions 7 and bearing frame 4 from which suspensions 7 go out. Frame 4 has bonding pads 6 and is divided into two parts by two slots. Hole 9 where permanent magnet 2 is placed with gap is made in center of mobile element 3. Mobile element 3 functioning as back-moving winding of converter is positioned together with magnet 2 in gap of magnetic circuit. EFFECT: simplified design and raised functional reliability of magnetoelectric force converter. 3 dwg |
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